3Way Heater Valve
3Way Heater Valve is using between vacuum pump and scrubber (Semiconductor, LCD, LED Etc.). It’s heating directly valve body and prevent by-product to be solidify. Also extent cleaning and PM cycle.
◈ Prevent By-Product To Be Solidify
3Way Valve heating type is heat directly to body, And it’s excellent to prevent by-product.
◈ Extent PM Cycle
Prevent by-product to be solidify and clogging pipe. And also prevent increase pressure.
Extent PM cycle more than 6month from 1week.