• 3wayValve01

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3Way Heater Valve

3Way Heater Valve is using between vacuum pump and scrubber (Semiconductor, LCD, LED Etc.). It’s heating directly valve body and prevent by-product to be solidify. Also extent cleaning and PM cycle.

◈ Prevent By-Product To Be Solidify
3Way Valve heating type is heat directly to body, And it’s excellent to prevent by-product.

◈ Extent PM Cycle
Prevent by-product to be solidify and clogging pipe. And also prevent increase pressure.
Extent PM cycle more than 6month from 1week.

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