Inner Heater is heating device. It’s inserted into the vacuum-related process equipment such as semiconductor, Display, LED. The remainder of the process off-gas is formed in the gas piping from the solid to prevent of the device.
Patent Registration No. 10-0967395
- Explanation of products
- Comparison between Before & After Application of Inner Heater
- Range of Application
- Application Process
◈ Based on the internal gas plumbing heating temperature Inner heater is T/C sensor inserted in the pipe based on the outside temperature of the heating temperature and not on the basis of piping gas eating and more efficient inhibition of the formation powder.
◈ Stability Inner heater is certificated S mark excellent safety certified products.
◈ Customized design Inner heater is spring coil type so can be installed in curved part of the pipe and designed to fit the size.
◈ Extend PM cycle When applied to the inner heater, It will maximize the growth of production and efficiency of manpower operation by extending PM cycle average 30 to 180days.
Dry Etch, CVD